Semiconductor vacuum bearing assembly

The Semiconductor vacuum bearing assembly is a type of bearing used in semiconductor processing equipment. It is designed to operate in a vacuum environment and provide high precision and stability for the equipment. The assembly consists of multiple components, including a bearing housing, ball bearings, races, and seals. The materials used for the assembly are often chosen for their low outgassing and high purity, which are important in semiconductor processing. The assembly may also have features such as temperature resistance, corrosion resistance, and low friction for optimal performance.